Nitrogen Trifluoride Applications

Nitrogen trifluoride is acclimated in the claret carving of silicon wafers. Today nitrogen trifluoride is predominantly alive in the charwoman of the PECVD accommodation in the high-volume assembly of liquid-crystal displays and silicon-based thin-film solar cells. In these applications NF3 is initially torn down in situ by a plasma. The consistent fluorine atoms are the alive charwoman agents that advance the polysilicon, silicon nitride and silicon oxide. Nitrogen trifluoride can be acclimated as able-bodied with tungsten silicide, and tungsten produced by CVD. NF3 has been advised as an environmentally bigger acting for sulfur hexafluoride or perfluorocarbons such as hexafluoroethane.The action appliance of the chemicals activated in claret processes is about beneath 20%. Therefore some of the PFCs and aswell some of the NF3 consistently escape into the atmosphere. Modern gas abatement systems can abatement such emissions.

Elemental fluorine has been alien as an environmentally affable backup for nitrogen trifluoride in the accomplish of flat-panel displays and thin-film solar cells.

Nitrogen trifluoride is aswell acclimated in hydrogen fluoride and deuterium fluoride lasers, which are types of actinic lasers. It is adopted to fluorine gas due to its acceptable administration properties, absorption its ample stability.

It is accordant with animate and Monel, as able-bodied as several plastics.